JPH06456Y2 - 単結晶引上装置のシール構造 - Google Patents

単結晶引上装置のシール構造

Info

Publication number
JPH06456Y2
JPH06456Y2 JP9982289U JP9982289U JPH06456Y2 JP H06456 Y2 JPH06456 Y2 JP H06456Y2 JP 9982289 U JP9982289 U JP 9982289U JP 9982289 U JP9982289 U JP 9982289U JP H06456 Y2 JPH06456 Y2 JP H06456Y2
Authority
JP
Japan
Prior art keywords
chamber
heater
single crystal
electrode
bellows
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP9982289U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0341862U (en]
Inventor
孝司 水石
道明 小田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Priority to JP9982289U priority Critical patent/JPH06456Y2/ja
Priority to EP19900309418 priority patent/EP0416799B1/en
Priority to DE1990616317 priority patent/DE69016317T2/de
Publication of JPH0341862U publication Critical patent/JPH0341862U/ja
Application granted granted Critical
Publication of JPH06456Y2 publication Critical patent/JPH06456Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14—Heating of the melt or the crystallised materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP9982289U 1989-08-29 1989-08-29 単結晶引上装置のシール構造 Expired - Lifetime JPH06456Y2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP9982289U JPH06456Y2 (ja) 1989-08-29 1989-08-29 単結晶引上装置のシール構造
EP19900309418 EP0416799B1 (en) 1989-08-29 1990-08-29 A single crystal pulling apparatus
DE1990616317 DE69016317T2 (de) 1989-08-29 1990-08-29 Einkristallziehungsapparat.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9982289U JPH06456Y2 (ja) 1989-08-29 1989-08-29 単結晶引上装置のシール構造

Publications (2)

Publication Number Publication Date
JPH0341862U JPH0341862U (en]) 1991-04-22
JPH06456Y2 true JPH06456Y2 (ja) 1994-01-05

Family

ID=14257524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9982289U Expired - Lifetime JPH06456Y2 (ja) 1989-08-29 1989-08-29 単結晶引上装置のシール構造

Country Status (3)

Country Link
EP (1) EP0416799B1 (en])
JP (1) JPH06456Y2 (en])
DE (1) DE69016317T2 (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102400232A (zh) * 2011-11-15 2012-04-04 镇江环太硅科技有限公司 一种单晶硅生长炉用石墨/炭毡复合电极
CN103334153B (zh) * 2013-06-26 2015-07-15 英利能源（中国）有限公司 一种单晶炉
CN107513759B (zh) * 2016-06-15 2019-11-19 上海新昇半导体科技有限公司 一种单晶硅生长炉

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3679370A (en) * 1970-07-31 1972-07-25 Western Electric Co Crystal grower with expandable chamber
US3953281A (en) * 1974-06-27 1976-04-27 International Business Machines Corporation Method and system for growing monocrystalline ingots

Also Published As

Publication number Publication date
EP0416799A2 (en) 1991-03-13
DE69016317D1 (de) 1995-03-09
EP0416799A3 (en) 1991-07-17
EP0416799B1 (en) 1995-01-25
DE69016317T2 (de) 1995-08-03
JPH0341862U (en]) 1991-04-22

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term